Replication of micro-structured imprint plastic mold via electro-spinning nanofiber process
نویسندگان
چکیده
منابع مشابه
Based on Hot Embossing Lithography Preparation of High-Precision Micron-Level Pattern
Compared with UV embossing and micro-contact imprinting, hot embossing technology is the first to be used in nano-imprint lithography, and is access to copying the parallel structure in micro-nano-scale at low cost and relatively faster speed. This paper explores which factors influence some pattern transferring accuracy appearing in the experiment: the adhesion between mold and polymethyl meth...
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ژورنال
عنوان ژورنال: Transactions of the JSME (in Japanese)
سال: 2015
ISSN: 2187-9761
DOI: 10.1299/transjsme.14-00571